Microdevice Creation Laboratory

Create small, high-performance, smart, and useful devices.

Microdevices with sensing, computing, and communication functions already support our daily lives and industries. For example, we can do a variety of things various thanks to various microdevices implemented in smartphones. In the future, microdevices will be increasingly integrated into the environment and our bodies, making our lives safer, more comfortable, and more convenient. Aiming to realize such a society, we are researching and developing new microdevices, functional materials and microfabrication technologies for their creation.

College of Engineering Mechanical Engineering Advanced Mechanical Engineering / Graduate School of Engineering and Science(Master's Program) Mechanical Engineering Course / Graduate School of Engineering and Science(Doctor's Program) Functional Control Systems Course
Faculty Name
YOSHIDA, Shinya
Keyword
Sensors,Micromachines,Materials Functional Design,Embedded Systems,Biological Information and Measurement,Medical engineering,Ultrasonic,Thin film,Vacuum,Hardware
Laboratory location
Research Building TOYOSU Campus 4F 04D32-a

STUDY FIELDS

  • Micro and Nano Engineering
  • MicroElectromechanical Systems (MEMS)
  • Thin Film Materials Engineering
  • Ultrasonic Engineering
  • Electronic Circuitry

FOR SOCIETY

Microdevices serve as essential key components in a variety of systems. For example, they will contribute to minimally invasive medicine for diagnosis and treatment, more secure biometrics, safe robotics and mobility, and comfortable virtual reality displays etc..

RESEARCH THEMES

  • Development of MEMS ultrasonic sensors and their applications
  • Research on deposition technology of ultra-high performance piezoelectric thin films
  • Research on toughening of piezoelectric single-crystal thin films
  • Edible (ingestible) sensors for healthcare application

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